WT-2000

The WT-2000 is a tabletop tool, suggested for mid-range fabs and laboratories.

Features and System Specifications:

• Wafer size: up to 300 mm with bare or dielectric coated surface
• Wafer handling: manual or Semilab-made indexer
• Loading options:
  • 100-200 mm cassette indexer
  • 300 mm 13 slot cassette indexer, including open cassettes for 100-300 mm wafers
  • 300 mm 25 slot cassette indexer, including FOUP, FOSB, and open cassettes for 100-300 mm wafers
• Objectives of detection:
  • Impurities due to heavy metal and transition metal contamination
  • Crystal defects
  • Optional iron concentration determination both in CZ and FZ wafers
• No wafer thickness limitation
• Fast measurement speed
• High lateral resolution
• Required surface passivation: thermal oxide, chemical passivation or corona charging

Each system can be configured based on the user’s requirements by adding measurement capabilities and automation capabilities described below.

Measurement capabilities:

• µ-PCD for measuring carrier lifetime
• SPV for measuring diffusion length
• JPV for measuring ion implants
• Eddy current measurement of sheet resistance