PMR-3000S Ion Implant Dose Monitor S

Based on significant improvements, the Semilab PMR-3000S enables in-line monitoring of implant processes on product wafers for immediate, accurate, and low-cost production control of implant systems and in-line monitoring for pre-anneal implant.

Features and System specifications:

  • Implant dose
    • Species As, B, P, BF2, In, Sb, C (application for other species under development)
  • Process requirements - Unannealed implanted layers, Surface oxide
  • Fully SEMI-compliant (300 mm) automation
  • Overhead transport (OHT) available
  • Fully compliant to Tier 1 contamination specs, including Class 1 mini-environment
  • Two FOUPs capable of handling wafers up to 300 mm size
  • State of the art software:
    • Recipe-based operation
    • Host communication
    • Different access levels
  • Pattern recognition option

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