SRP-170 Spreading Resistance Profiler

The SRP-170 system is a cost effective, commercially available spreading resistance profiling metrology system for resistivity and carrier density profiling in all silicon semiconductor structures of device processing. 

Measured parameters

• Dopant concentration and resistivity
• Carrier density and resistivity profile shape
• Junction depth
• Transition width
• Electrically activated dose

Features

• Transition zone, junction depth calculation
• Low noise, ultrahigh precision stage
• Effective, high quality vibration and acoustic isolation in measurement chamber
• Touch-driven user interface and user-friendly software 

Options

• Bevel Angle Measurement (BAM): a laserbased sensor that allows the high precision measurement of the actual bevel angle of the samples for exact depth profiling
• Stand-Alone Bevel sample polishing unit