WT-2000 / 2A

The WT-2000 is suggested for mid-range fabs and laboratories.

Features and System specifications:

• Wafer size: up to 300 mm with bare or dielectric coated surface
• Wafer handling: manual or Semilab-made indexer
• Loading options:
  • 100-200 mm cassette indexer
  • 300 mm 13 slot cassette indexer, including open cassettes for 100-300 mm wafers
  • 300 mm 25 slot cassette indexer, including FOUP, FOSB, and open cassettes for 100-300 mm wafers
• Light sources: semiconductor lasers (SPV head with 4 or optional 8 lasers)
• Full mapping 
• Point measurements at predefined points
• Sample resistivity: down to 0.01 Ωcm
• Optional bias light:
  • High intensity IR LED
  • 30 W halogen lamp
• Automatic Iron-Boron Dissociation Unit - for Iron concentration
• Specific measurement performance at specific, programmable locations

Each system can be configured based on the user’s requirements by adding measurement capabilities and automation capabilities described below.

Measurement capabilities:

• µ-PCD for measuring carrier lifetime
• SPV for measuring diffusion length
• VQ for oxide monitoring
• JPV for measuring ion implants
• Eddy current measurement of sheet resistance