LST-2500HD Light Scattering Tomograph High Dynamic-range System
| LST-2500HD | ||
|---|---|---|
| Area of application | Wafer fabs / R&D | |
| Wafer handling | Automated loading | |
| Sample positioning |
Advanced autofocus mechanism |
|
| Scanning range |
Whole wafer diameter scan** |
|
| Evaluation |
Automatic evaluation parallel with measurements |
|
| Denuded zone |
DZ determination from one image |
|
| Reporting functions (single point) |
Density, size depth profile, size histogram |
|
| Reporting functions (radial scan) |
Average density, average size, DZ radial distribution |
|
**excluding bad edge area
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