WT-2000 PL
WT-2000 series are fast measurement-based tools (20 wafers/hour - 2500 points) with high lateral resolution (down to 50 mm).
Features and System specifications:
| WT-2000 | WT-2100 |
WT-2200 |
|
|---|---|---|---|
| Platform | Compact Size | Medium Size Equipment | Fully Automated |
| Loading | Manual Loading | Manual Loading | Two Load Ports (FOUP/SMIF) |
| Lasers | Two Excitation Lasers | Three Excitation Lasers | Three Excitation Lasers (a fourth laser is possible on request) |
| Detectors | Two Detectors | Two Detectors | Three Detectors |
| Spectral region | from DUV to 1.7 µm (or more) | from DUV to NIR | from DUV to NIR |
| Wafer size | 50 mm to 200 mm | 50 mm to 300 mm | 150 / 200 mm or 300 mm |
| Additional options | - | Possibility to build a Second Metrology Unit (e.g Raman, SE or iSR) | The most flexible platform with room for Three Different Metrology Units (Raman, SE, iSR, bow) |