LSL-2500
LSL-2500 is a unique metrology system on the semiconductor market. Its special dual illumination unit allows BMD detection in Standard mode (for bare wafers) and in Tilted mode (for patterned wafers), while the two measurement modes show perfect correlation.
Since LSL is a sister development of the industry standard LST-2500HD system, LSL is dedicated to being the reference technique of BMD control on bare and patterned wafers as well.
| LSL-2500 | |
|---|---|
| Area of application | IC makers / Wafer fabs / R&D |
| Wafer handling | Automated loading |
| Sample positioning |
Advanced autofocus mechanism |
| Scanning range |
Whole wafer diameter scan** |
| Evaluation |
Automatic evaluation parallel with measurements |
| Denuded zone |
DZ determination from one image (only in normal mode) |
| Reporting functions (single point) |
Density, size depth profile, size histogram |
| Reporting functions (radial scan) |
Average density, average size, DZ radial distribution |
**excluding bad edge area
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