EIR-3000 Enhanced Infrared Reflectometer
The EIR-3000 is a unique automated epi thickness measurement system with infrared spectroscopic reflectometer for high throughput epi thickness measurement. Fully compliant to the relevant SEMI / CE standards. The EIR product line is based on smart, reliable electronics, which improves equipment uptime and decreases maintenance needs.
Applications
- Interferogram measurements:
- Si EPI thickness measurement
- Reflection measurement:
- Si, SiC, SOI thickness measurement of full sheet wafers
- Allows more complex analysis of materials: Transition zone and higher dopant concentration measurement of Si, SiC samples, oxid thickness in SOI samples
- Dielectric composition and thickness measurement: PSG, BSG
Features
| EIR-3000 | |
|---|---|
| Loadport | 1 or 2 loadports, full OHT compatibility |
| Sample sizes | 12” |
| Substrate materials | Si |
| Edge grip | Edge grip robot by default |
| FFU | FFU included |
| SECS/GEM compatible | Yes |
Options
- BPSG and FSG application options
- Transmission measurement option:
- Absorption peak analysis such as Si-H and N-H peak in SiN samples, O-H bonds for water contamination monitoring
- Bulk impurity measurement of Oi
- Signal tower with 4 colors
- Ionizer