µSE / SE-3000 Microspot Spectroscopic Ellipsometer
Microspot spectroscopic ellipsometer of Semilab are capable of fully automated characterization of patterned, compound or (O)LED 300 mm samples.
Applications:
- Primary applications:
- Front-end applications
- Production wafer monitoring
- Process development
- Advanced Process Control:
- Across wafer uniformity
- Wafer to wafer uniformity
- Batch to batch uniformity
Features and System specifications:
| μSE/SE-3000 | |
|---|---|
| Wavelength range | UV-VIS 193 nm - 900 nm |
| Mapping area | Max. 300 mm diameter |
| Mapping point options | User defined mapping point options, up to 3 000 points |
| Loadport type | Dual loadports with OHT capability and SECS/GEM 2 FOUPs with bridge compatibility |
| Sample sizes | 300 mm / 200 mm (with cassette insert) |
| Sample materials | Transparent (glass), Si, GaAs, SiC, etc. |
Options:
In order to address great variety of applications SE systems can be combined with other metrologies additionally to the standard spectroscopic ellipsometry.
Metrology options:
- Spectroscopic reflectometry (SR)
- Bow-Warp
- Global Stress
- Raman Spectroscopy
- Spectral Photoluminescence
| μSR | SR | |
|---|---|---|
| Wavelength range | 380 nm - 2100 nm | 193 nm -1700 nm |
| Evaluation method | Spectrum (VIS) / Spectrum or FFT-based (NIR) |
Spectrum and FFT-based |
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