The PSI product line is developed for the automated fabs with high capacity and is specialized for the inspection and visualization of crystal defects related to mechanical stress in Si wafers or slugs.
Features and System Specifications:
PSI-3000 | |
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Wafer size | 150 mm / 200 mm / 300 mm |
Loading | Automatic for one selected sample size Manual loading for one or two additional diameters |
Platform | Dual FOUP load port capability, SECS/GEM and OHT |
Applications:
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